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Semiconductor Manufacturing

In semiconductor applications, DuPont™ Vespel® machined parts have been proven to provide excellent quality and often outperform parts made from other commonly used materials, including ceramics, quartz, and other engineered plastic materials. Manufacturers working with this material encounter numerous cost-saving benefits, such as long part life, reduction in maintenance downtime, and the ability to withstand repeated cleaning cycles. These other factors make semiconductor parts made from DuPont™ Vespel® a good value.
In addition, DuPont’s stringent standards for high purity and consistency of product carry through to the end user, with excellent yields of semiconductor parts that work as designed without problems. Because thyssenkrupp Engineered Plastics supplies DuPont™ Vespel® in sheet, rod, and tube, machinists can select the best shape for their application and reduce the amount of wasted material.
Unlike metal parts, the low friction aspect of  DuPont™ Vespel® parts makes lubrication a thing of the past. This feature can lengthen part life, aid in reducing the potential for impurities to enter the clean environment needed for semiconductor applications, and reduce maintenance downtime.

DuPont Vespel ® Shapes for High Temperature Applications

Semiconductor parts machined from DuPont™ Vespel® are able to work reliably in temperatures that exceed 400°F. They can work in situations that reach temperatures as high as 550°F, and, in limited exposure, temperatures of up to 900°F without failure.
These high temperature characteristics are coupled with a low coefficient of thermal expansion. In fact, DuPont™ Vespel® exhibits no observable softening or melting point.
In addition to handling high temperatures, parts made from these materials are low friction, making them an excellent choice for high wear applications, such as sliding contact applications where superior wear performance over a broad temperature range is needed. DuPont™ Vespel® maintains very tight tolerances and excellent dimensional stability in high temperature conditions.

Chemical Resistance

In addition, DuPont™ Vespel® provides good chemical resistance and is not affected by many of the liquids used in semiconductor manufacturing, like cleaning solvents, oils for hydraulics, etching solutions, and other electronic chemicals. It is also acceptable for use with most gases commonly used in semiconductor process vessels:
  • Epitaxial reactors
  • Photoresist developers
  • Dry etchers
  • Ion implanters
  • Etchants
  • Wide variety of solvents
DuPont™ Vespel® can also withstand the extremely harsh conditions of high plasma energy, and vacuum that reaches 10-9 torr.

DuPont™ Vespel® as an Electrical Insulator in Semiconductor Manufacturing

In addition to being resilient and long wearing, DuPont™ Vespel® parts exhibit excellent dielectric properties and are able to provide cushioning, dampening, and/or isolation. DuPont™ Vespel® is also a good choice for thermal and electrical insulators where insulators separate wafers from stainless steel pedestals during ion implantation.
Insulator parts manufactured from Vespel® help minimize potential contamination and can provide excellent service life, along with reducing the need for maintenance, downtime, and other costly activities.
Semiconductor processes where DuPont™ Vespel® can be used as an electrical insulator include:
  • Wafer Processing
  • Crystal slicing
  • Photoresist applications
  • Dry etching
  • Ion implantation
  • Clamping Rings used in oxide etching
  • Probe Check Insulators
As with any material, testing should be done to ensure it is suitable for your application. Part life in the extreme conditions of semiconductor production can depend on many factors, such as chamber conditions, the type of etching solutions used, and exposure to chemicals and gases.

DuPont™ Vespel® Machined Parts for Semiconductor Manufacturing

Screws and fasteners for wafer clamping processes: Dupont™ Vespel®’s excellent strength, dimensional stability, low friction, and temperature and chemical resistance make it an ideal material for manufacturing screws and fasteners used throughout the semiconductor manufacturing process. Screws and fasteners made from Dupont™ Vespel® can handle the torque necessary for fastening and tightening screws, while its ease of machining make runs of numerous detailed parts easy.
Vacuum Pads: DuPont™ Vespel®  is also an excellent choice for vacuum pads used in automated wafer handling systems, where contact surfaces must be made from materials that are resilient, long wearing, free of particulate, and dimensionally stable.
Positioning Assemblies:  Because of the above-mentioned benefits, Dupont™ Vespel® parts are widely used in vacuum pickup systems, carrying devices, and positioning assemblies.
Wafer Guides: Wafer guides made from DuPont™ Vespel® withstand process temperatures up to 288°C (550°F) without damage or deformation. The resilience of Vespel® and its low thermal conductivity help avoid buildup of thermal stresses in wafers. In addition, DuPont™ Vespel® minimizes particulate contamination.
Vacuum Pickup Strips & Tips: Parts and wafer carriers made from DuPont™ Vespel® are milled to 1-3 mm thick in order to permit air passages. DuPont™ Vespel® has the strength to hold up in these extremely thin sections, and this resilience helps protect wafers from handling damage. The material’s ease of machining helps produce accurate high quality parts consistently. DuPont™ Vespel® can be machined into intricate designs which may include slots and undercuts.

thyssenkrupp Engineered Plastics Is the DuPont™ Vespel® Authorized Distributor for Eastern US and Canada

Online Plastics®, the online store for ThyssenKrupp Materials NA thyssenkrupp Engineered Plastics Division, is your DuPont™ appointed authorized distributor of Authentic Vespel® Shapes in the Eastern United States and Canada.  Request a quote today or contact us for more information. One of our experienced sales staff will be happy to assist you with pricing and material selection if you need.